Polishing apparatus with carrier ring and carrier head employing like polarities
US6354928B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2000 |
| Grant date | Mar 12, 2002 |
| Priority date | — |
| Expiry date | Apr 21, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/32
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention provides a polishing apparatus comprising a carrier head having a periphery, a first region, a carrier ring, and a second region. The carrier ring is coupled to the periphery. The carrier ring and carrier head are configured to cooperatively receive an object to be polished. The first region is associated with the carrier head and is capable of manifesting a polarity proximate the carrier ring. The second region is associated with the carrier ring and is capable of manifesting the polarity proximate the first region. The first and second regions have like polarities that create a repelling force between the carrier head and the carrier ring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.