Patent · US Expired

Heating element for heating crucibles and arrangement of heating elements

US6355910B1 · kind B1 · utility

8Cited by

12References

17Claims

0Family size

Assignee

FREIBERGER COMPOUND MATERIALS GMBH · DE

Inventors

Albrecht Seidl · Niedernberg, DE
Stefan Eichler · Dresden, DE
Andreas Kohler · Hamburg, DE

Key dates

Filing date	Dec 8, 2000
Grant date	Mar 12, 2002
Priority date	—
Expiry date	Dec 8, 2020

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T117/1068
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

There is provided a heating element and an arrangement of heating elements, respectively, for heating crucibles, in particular for LEC devices for growing semiconductor single crystals, with a tulip-shaped bottom heater (20) being built such that the heater legs of the main heater (40) positioned thereabove can barely be guided towards the bottom. Such arrangement of bottom and main heater enables multi-heater arrangements without having to interfere with a lateral insulation (18) which, thus, need not be cut out or pierced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.