Surface texture measuring apparatus
US6357286B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2000 |
| Grant date | Mar 19, 2002 |
| Priority date | — |
| Expiry date | Apr 20, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y15/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface texture measuring apparatus that ensures detection of surface texture of a workpiece even when the surface has a steep unevenness. A detecting device having a stylus is moved in the X axis direction along the surface of the workpiece, and displacement in the Z axis direction is converted into electric signals to detect unevenness of the surface of the workpiece. When the surface has a steep unevenness and the amount of displacement in the Z axis direction reaches or exceeds a threshold, a Z axis detected value and an X axis detected value obtained at that moment are output. The moving speed of the detecting device is decreased when the surface has a steep unevenness, while the moving speed is increased when the surface does not have a steep unevenness, making it possible to improve following characteristics and to reduce measurement time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.