Cleaning compositions and use thereof containing ammonium hydroxide and fluorosurfactant
US6358899B1 · kind B1 · utility
4Cited by
3References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 23, 2000 |
| Grant date | Mar 19, 2002 |
| Priority date | — |
| Expiry date | Mar 23, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D7/06
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
An aqueous composition comprising ammonium hydroxide in an amount of about 1 to about 30% by weight calculated as NH3 and a surface active agent represented by the formulaXF2C(CFY)nSO3AwhereinX=F, OH or SO3A;Y=F, H, OH or may be omitted thereby creating a double bond;n=1-12;A=NH4+, H+, Na+, K+, Li+, R+ or organic amine cation and R is 1-4 straight chain alkyl group;and wherein the fluoroalkyl group is a linear group; and wherein the surface active agent is present in an amount of about 5 ppm to about 2000 ppm is useful for cleaning photomasks and especially chromium photomasks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.