Thomas Burkley Hackett
3Patents
3h-index
1Co-inventors
33Inventor score
Filing activity: Aug 28, 1998 → Aug 31, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6162370A | Composition and method for selectively etching a silicon nitride film | Electricity | 109 | Expired |
| US6303514A | Composition and method for selectively etching a silicon nitride film | Electricity | 9 | Expired |
| US6358899B1 | Cleaning compositions and use thereof containing ammonium hydroxide and fluorosurfactant | Chemistry; Metallurgy | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.