Acceleration sensor

US6360604B1 · kind B1 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Franz Laermer · Stuttgart, DE
• Bernhard Elsner · Bad Berka, DE
• Wilhelm Frey · Palo Alto, US

Key dates

• Filing date: Oct 9, 1999
• Grant date: Mar 26, 2002
• Expiry date: Oct 9, 2019

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0814
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor has an oscillating structure which is movably suspended on a substrate and can be deflected by an acting acceleration. The acceleration sensor also has an analyzing arrangement detecting a deflection of the oscillating structure due to the acceleration. The oscillating structure and/or the analyzing arrangement are connected to the substrate by mechanical decoupling devices.