Wilhelm Frey
38Patents
11h-index
31Co-inventors
71Inventor score
Filing activity: Apr 22, 1998 → Mar 18, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5996409A | Acceleration sensing device | Physics | 69 | Expired |
| US6555443B1 | Method for production of a thin film and a thin-film solar cell, in particular, on a carrier substrate | Emerging Cross-Sectional Technologies | 59 | Expired |
| US7449355B2 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Electricity | 45 | Expired |
| US6369931B1 | Method for manufacturing a micromechanical device | Performing Operations; Transporting | 32 | Expired |
| US6443008B1 | Decoupled multi-disk gyroscope | Physics | 31 | Expired |
| US6825057B1 | Thermal membrane sensor and method for the production thereof | Physics | 27 | Expired |
| US7026184B2 | Method of fabricating microstructures and devices made therefrom | Performing Operations; Transporting | 26 | Expired |
| US6677249B2 | Method for manufacturing breakaway layers for detaching deposited layer systems | Emerging Cross-Sectional Technologies | 21 | Expired |
| US6592664B1 | Method and device for epitaxial deposition of atoms or molecules from a reactive gas on a deposition surface of a substrate | Emerging Cross-Sectional Technologies | 19 | Expired |
| US6672732B1 | Micromechanical oscillating device | Physics | 14 | Expired |
| US6486665B1 | Magnetic field sensor having deformable conductor loop segment | Physics | 11 | Expired |
| US6726815B1 | Electrochemical etching cell | Emerging Cross-Sectional Technologies | 10 | Expired |
| US7319372B2 | In-plane mechanically coupled microelectromechanical tuning fork resonators | Electricity | 10 | Expired |
| US6655834B1 | Sensor, in particular thermal sensor, and method for manufacturing a largely self-supporting membrane | Performing Operations; Transporting | 8 | Expired |
| US6372656B1 | Method of producing a radiation sensor | Electricity | 8 | Expired |
| US6648389B2 | Process for manipulating components, a microtool for implementing the process, and a process for manufacturing the microtool or microtool parts | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6489864B2 | Filter for electric signals | Electricity | 7 | Expired |
| US9453292B2 | Method and apparatus for making a spunbond | Textiles; Paper | 7 | Active |
| US7625773B2 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Electricity | 6 | Active |
| US6360604B1 | Acceleration sensor | Physics | 5 | Expired |
| US7922849B2 | Process and apparatus for manufacturing spun-bonded fabric | Textiles; Paper | 5 | Active |
| US6905615B2 | Method of manufacturing a micromechanical component | Performing Operations; Transporting | 4 | Expired |
| US6790699B2 | Method for manufacturing a semiconductor device | Performing Operations; Transporting | 4 | Expired |
| US6901800B2 | Differential in-plane tunneling current sensor | Physics | 3 | Expired |
| US6856067B2 | Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensor | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.