Valve for use with high purity gas
US6361020B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2000 |
| Grant date | Mar 26, 2002 |
| Priority date | — |
| Expiry date | Jan 12, 2020 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K41/12
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A valve for use with an ultra high purity gas comprising a valve body defining a valve chamber having a valve outlet through which gas is discharged and containing a reciprocable sealing member, characterized in that the valve chamber is in fluid communication with a source of the gas and in that the sealing member is reciprocable along an axis substantially parallel to the direction of flow of gas discharged from the valve outlet and into and out of sealing contact with a sealing face located within the valve chamber and circumscribing the inlet end of a valve outlet pipe, the opposite, outlet end of which pipe forms the valve outlet. The valve has a low wetted area and is thus easy to purge, and the valve design both reduces wear and restricts it to a single component which is easily replaced when necessary.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.