Method for preparing high temperature superconductor
US6361598B1 · kind B1 · utility
23Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2000 |
| Grant date | Mar 26, 2002 |
| Priority date | — |
| Expiry date | Jul 20, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/16
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of depositing a biaxially textured metal oxide on a substrate defining a plane in which metal oxide atoms are vaporized from a source to form a plume of metal oxide atoms. Atoms in the plume disposed at a selected angle in a predetermined range of angles to the plane of the substrate are allowed to contact the substrate while preventing atoms outside a selected angle from reaching the substrate. The preferred range of angles is 40°-70° and the preferred angle is 60°±5°. A moving substrate is disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.