Scanning electron microscope/energy dispersive spectroscopy sample preparation method and sample produced thereby
US6362475B1 · kind B1 · utility
7Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 22, 1999 |
| Grant date | Mar 26, 2002 |
| Priority date | — |
| Expiry date | Jun 22, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2561
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of preparing a monolithic structure for scanning electron microscope/energy dispersive spectroscopy (SEM/EDS) and a sample produced by way of the method. In one embodiment, the method includes: (1) aiming a focused ion beam at a location behind or beneath an area of interest in the monolithic structure and (2) employing the focused ion beam to remove at least a portion of an interaction volume of material beneath the area of interest. The area of interest preferably remains substantially intact for the spectroscopy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.