Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effects
US6363094B1 · kind B1 · utility
12Cited by
13References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2000 |
| Grant date | Mar 26, 2002 |
| Priority date | — |
| Expiry date | Nov 1, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/2256
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A long life laser chamber for a halogen containing gas discharge laser. In a preferred embodiment electrode erosion caused by excited fluorine (i.e., atomic fluorine and fluorine ions) is reduced by forcing the excited fluorine away from the discharge footprint of the electrodes. Preferred embodiments include electrodes with a large number of small holes in the discharge footprint through which laser gas flows to remove the excited fluorine from the footprint region in the time period between electric discharges.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.