Test structure, integrated circuit, and test method
US6366098B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 18, 1999 |
| Grant date | Apr 2, 2002 |
| Priority date | — |
| Expiry date | Jun 18, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2884
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test structure includes a single current-measuring means for measuring current between a supply terminal and ground, and first and second branches for measuring capacitance between first and second metal lines. The first branch includes a first switch coupled between the current-measuring means and the first line, and a second switch coupled between the first line and ground. Similarly, the second branch includes a third switch coupled between the current-measuring means and the second line, and a fourth switch coupled between the second line and ground. A method for testing a circuit is also provided. According to the method, the capacitance between first and second metal lines is calculated by: measuring a first current needed to bring the first line to the voltage of a first terminal while the other lines are at the voltage of a second terminal, measuring a second current needed to bring the second line to the voltage of the first terminal while the other lines are at the voltage of the second terminal, and measuring a third current needed to bring the first and second lines to the voltage of the first terminal while the other lines are at the voltage of the second terminal. T…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.