Patent · US Expired

Method of straightening the supporting surfaces of supporting elements for optical elements

US6366413B1 · kind B1 · utility

3Cited by

3References

5Claims

0Family size

Assignee

Carl Zeiss Stiftung · DE

Inventors

Michael Trunz · Pfahlheim, DE
Bernhard Gellrich · Aalen, DE

Key dates

Filing date	Oct 19, 2000
Grant date	Apr 2, 2002
Priority date	—
Expiry date	Oct 19, 2020

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70825
WIPO fieldOptics
WIPO sectorInstruments

Abstract

In a method of straightening the supporting surfaces (5) of supporting elements (3) for optical elements (1), in particular in lens systems of microlithography projection exposure equipment, the supporting elements (3) and/or at least one bearing part (2, 6) connected to the supporting elements (3) for the optical elements (1) are deformed by a laser beam (A, B, C, D) produced by a laser (7) in such a way that the supporting surfaces (5) are at least approximately aligned with a common supporting plane or some other prescribed distribution.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.