Inventor · Pfahlheim, DE

Michael Trunz

15Patents
6h-index
28Co-inventors
58Inventor score

Filing activity: Dec 11, 1998 → Apr 21, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US6229657A Assembly of optical element and mount Physics 54 Expired
US6392825B1 Assembly comprising an optical element and a mount Physics 40 Expired
US6259571A Adjustable assembly Physics 32 Expired
US6191898A Optical imaging device, particularly an objective, with at least one optical element Physics 29 Expired
US6834163B2 Camera system having at least two first cameras and two second cameras Physics 23 Expired
US6369959B1 Assembly comprising an optical element and a mount Physics 14 Expired
US6441975B1 Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element Physics 5 Expired
US6099193A Composite body Emerging Cross-Sectional Technologies 4 Expired
US6366413B1 Method of straightening the supporting surfaces of supporting elements for optical elements Physics 3 Expired
US6227754A Composite body Emerging Cross-Sectional Technologies 3 Expired
US6655037B2 Coordinate measuring apparatus having a bending-resistant measuring table Physics 2 Expired
US6111691A Positioning table Physics 1 Expired
US6969854B1 Arrangement for holding a particle beam apparatus Electricity 1 Expired
US7227707B2 Holding device for an optical element Physics 0 Expired
US7274430B2 Optical arrangement and projection exposure system for microlithography with passive thermal compensation Physics 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.