Potted transducer array with matching network in a multiple pass configuration
US6367493B2 · kind B2 · utility
2Cited by
26References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2001 |
| Grant date | Apr 9, 2002 |
| Priority date | — |
| Expiry date | Apr 10, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
The invention provides a pair of parallel megasonic transducers that generate parallel columns of megasonic waves across a cleaning container. Semiconductor wafers move back and forth transverse to the columns. The transducers have their back side potted with a silicone elastomer to prevent corrosion. In another embodiment megasonic waves from in-line transducers are dispersed with a cylindrical quartz rod. Water is enriched with ozone by pumping ozone under pressure through a filter into sealed housing of deionized water.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.