Fluid dispensing apparatus
US6367669B1 · kind B1 · utility
32Cited by
5References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2000 |
| Grant date | Apr 9, 2002 |
| Priority date | — |
| Expiry date | Dec 14, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F11/021
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Fluid dispensing apparatus for dispensing small precise metered quantities of fluid, for example in a semiconductor manufacturing process, comprises two metering chambers disposed in series. Each metering chamber has an associated piston rod and fluid is dispensed therefrom alternately. Twice the volume of fluid is displaced from the upstream metering chamber so that when it dispenses fluid at the same time it can refill the second downstream metering chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.