Method for producing diodes

US6368932B1 · kind B1 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Herbert Goebel · Gräfelfing, DE
• Vesna Goebel · Reutlingen, DE

Key dates

• Filing date: Sep 6, 2000
• Grant date: Apr 9, 2002
• Expiry date: Sep 6, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D8/25

Abstract

A method is proposed that functions to produce Zener diodes. The method includes a two-part film diffusion step for producing flatter and deeper doping profiles using neutral films.