Method of measuring electromagnetic radiation

US6369363B2 · kind B2 · utility

Assignee

• Steag AST · DE

Inventors

• Markus Hauf · Ulm, DE
• Thomas Knarr · Langenau, DE
• Heinrich Walk · Allmendingen, DE
• Horst Balthasar · Neu-Ulm, DE
• Uwe Muller · Linz, AT

Key dates

• Filing date: Feb 16, 2001
• Grant date: Apr 9, 2002
• Expiry date: Feb 16, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J5/0003
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method is provide for measuring electromagnetic radiation radiated from a surface of an object that is irradiated by electromagnetic radiation given off by at least one radiation source. The radiation given off by the radiation source is determined by at least one first detector, and the radiation given off by the irradiated object is determined by at least one second detector that measures the radiation. The radiation from the at least one radiation source is actively modulated with at least one characteristic pyrometer. The radiation determined by the second detector is corrected with the radiation determined by the first detector to compensate for the radiation of the radiation source reflected from the object.