Model-based predictive control of thermal processing
US6373033B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2000 |
| Grant date | Apr 16, 2002 |
| Priority date | — |
| Expiry date | Jun 27, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D23/1931
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A nonlinear model-based predictive temperature control system is described for use in thermal process reactors. A multivariable temperature response is predicted using a nonlinear parameterized model of a thermal process reactor. The nonlinear parameterized model is implemented using a neural network. Predictions are made in an auto-regressive moving average fashion with a receding prediction horizon. Model predictions are incorporated into a control law for estimating the optimum future control strategy. The high-speed, predictive nature of the controller renders it advantageous in multivariable rapid thermal processing reactors where fast response and high temperature uniformity are needed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.