Patent assignee · US · COMPANY

ASM America, Inc.

312Patents
140Active
312Granted
63Portfolio score

Filing activity: Apr 24, 1986 → Apr 11, 2023 · 95 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6511539B1 Apparatus and method for growth of a thin film Emerging Cross-Sectional Technologies 918 Expired
US9017481B1 Process feed management for semiconductor substrate processing Electricity 716 Active
US6053982A Wafer support system Electricity 649 Expired
US7297641B2 Method to form ultra high quality silicon-containing compound layers Electricity 593 Expired
US7611751B2 Vapor deposition of metal carbide films Chemistry; Metallurgy 581 Active
US6743738B2 Dopant precursors and processes Emerging Cross-Sectional Technologies 573 Expired
US7122085B2 Sublimation bed employing carrier gas guidance structures Chemistry; Metallurgy 563 Expired
US8367528B2 Cyclical epitaxial deposition and etch Electricity 557 Active
US8137462B2 Precursor delivery system Chemistry; Metallurgy 546 Active
US6325858A Long life high temperature process chamber Physics 540 Expired
US6093252A Process chamber with inner support Electricity 540 Expired
US8278176B2 Selective epitaxial formation of semiconductor films Electricity 540 Active
US8216380B2 Gap maintenance for opening to process chamber Electricity 538 Active
USD614153S1 Reactant source vessel General 538 Expired
US6594550B1 Method and system for using a buffer to track robotic movement Physics 531 Expired
US8071452B2 Atomic layer deposition of hafnium lanthanum oxides Electricity 531 Active
US8287648B2 Method and apparatus for minimizing contamination in semiconductor processing chamber Electricity 530 Active
US8877655B2 Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species Electricity 529 Active
US8986456B2 Precursor delivery system Chemistry; Metallurgy 528 Active
US8883270B2 Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen species Chemistry; Metallurgy 527 Active
US7498242B2 Plasma pre-treating surfaces for atomic layer deposition Electricity 526 Active
US8802201B2 Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species Chemistry; Metallurgy 521 Active
US7713874B2 Periodic plasma annealing in an ALD-type process Electricity 521 Active
US8076237B2 Method and apparatus for 3D interconnect Emerging Cross-Sectional Technologies 520 Active
US6692576B2 Wafer support system Electricity 517 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.