Method apparatus for a coaxial optical microscope with focused ion beam
US6373070B1 · kind B1 · utility
36Cited by
21References
30Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 12, 1999 |
| Grant date | Apr 16, 2002 |
| Priority date | — |
| Expiry date | Oct 12, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3005
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An optical microscope has an optical axis that coincides with a focused ion beam. The optical microscope can be used to locate target features on a specimen for subsequent operations by the ion beam, thereby eliminating the need for complex and potentially inaccurate registration procedures. The optical microscope can use infrared light so that features on a silicon flip chip are observable through the silicon from the backside. The ion beam can then machine the chip to expose the features for subsequent operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.