Microvalve
US6382588B1 · kind B1 · utility
22Cited by
7References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 8, 2000 |
| Grant date | May 7, 2002 |
| Priority date | — |
| Expiry date | Nov 8, 2020 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/008
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The valve seat is located between an inlet opening and an outlet opening, with a connecting stub against which an elastic membrane presses. The membrane is disposed above a cavity and formed by a part of a polysilicon layer. When a medium flows onto the side of the membrane facing the connecting stub, the membrane is lifted off the connecting stub and is pulled into the cavity, so that the medium can flow through the valve. The membrane can be stiffened by a stamp-like attachment, in order to ensure that the valve opens uniformly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.