Slot antenna used for plasma surface processing apparatus
US6388632B1 · kind B1 · utility
36Cited by
2References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2000 |
| Grant date | May 14, 2002 |
| Priority date | — |
| Expiry date | Mar 29, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A slot antenna includes an antenna guide formed with a recess, a dielectric member received in the recess, a slot plate held in contact with the dielectric member; and a waveguide connected to the antenna guide for introduction of microwaves. The slot plate is uniformly supported by the dielectric member. Alternatively, the slot plate is provided with an expansion absorbing region, so that the slot plate is displaceable relative to the dielectric member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.