Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge

US6389106B1 · kind B1 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Willi Neff · Kelmis, BE
• Rainer Lebert · Kelmis, BE
• Guido Schriever · Oettingen, DE
• Klaus Bergmann · Heilbronn, DE

Key dates

• Filing date: Jul 28, 2000
• Grant date: May 14, 2002
• Expiry date: Jul 28, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H1/48
• WIPO field: Medical technology
• WIPO sector: Instruments

Abstract

A method and a device for generating extreme ultraviolet (EUV) and soft x-ray radiation from a gas discharge. The device has at least two electrodes each having a flush opening by which an axis of symmetry is defined, in which an intermediate space with a wide spatial homogenous gas filling between anode and cathode is provided. The electrodes are formed in such a way, that the gas discharge is formed exclusively in the volume defined by the flush openings. The current pulses with respect to amplitude and period duration are selected in such a way that a dense hot plasma channel is formed on the axis of symmetry, the plasma being the source of EUV and/or soft x-ray radiation. The preferred area of application is the EUV projection lithography in the spectral range around 13 nm.