Willi Neff
14Patents
6h-index
25Co-inventors
66Inventor score
Filing activity: Sep 7, 1984 → Dec 13, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4596030A | Apparatus for generating a source of plasma with high radiation intensity in the X-ray region | Emerging Cross-Sectional Technologies | 73 | Expired |
| US5023897A | Device for generating X-radiation with a plasma source | Electricity | 69 | Expired |
| US7427766B2 | Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation | Electricity | 17 | Expired |
| US5698039A | Process for cleaning a substrate using a barrier discharge | Electricity | 12 | Expired |
| US6461409B1 | Device and method for treating flowing gases, in particular exhaust gases | Mechanical Engineering; Lighting; Heating | 9 | Expired |
| US6389106B1 | Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge | Electricity | 9 | Expired |
| US6788763B1 | Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge | Physics | 6 | Expired |
| US7126143B2 | Method and device for producing extreme ultraviolet radiation and soft x-ray radiation | Physics | 3 | Expired |
| US6269631A | Process and device for operating an internal combustion engine with less pollutant emission | Mechanical Engineering; Lighting; Heating | 3 | Expired |
| US7518300B2 | Method and device for the generation of a plasma through electric discharge in a discharge space | Electricity | 3 | Expired |
| US7734014B2 | Extreme UV and soft X ray generator | Electricity | 3 | Active |
| US6967341B2 | Method and device for the generation of far ultraviolet or soft x-ray radiation | Physics | 3 | Expired |
| US7397190B2 | Gas discharge lamp for extreme UV radiation | Electricity | 2 | Expired |
| US7809112B2 | Method and device for generating EUV radiation and/or soft X-ray radiation | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.