COMPOSITE MATERIAL AND MANUFACTURING METHOD THEREOF, SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF, SUBSTRATE MOUNTING STAGE AND MANUFACTURING METHOD THEREOF, AND SUBSTRATE PROCESSING METHOD
US6391437B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 29, 1998 |
| Grant date | May 21, 2002 |
| Priority date | — |
| Expiry date | Jan 29, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249956
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The invention provides a substrate processing apparatus using a composite material which permits avoidance of occurrence of damages caused by the difference in thermal expansion between different materials and can be with stand the use at high temperatures. The substrate processing apparatus for processing a substrate is partially (for example, a substrate mounting stage) composed of a composite material 11 consisting of a matrix 12 comprising a ceramics member made of, for example, cordierite ceramics, aluminum nitride and/or a texture filled with an aluminum-based material (for example, aluminum or aluminum and silicon), and a ceramics layer (comprising, for example, Al2O3 and/or AlN) provided on the surface of the matrix 12.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.