Shinsuke Hirano
29Patents
8h-index
25Co-inventors
75Inventor score
Filing activity: Feb 21, 1997 → Sep 2, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6120661A | Apparatus for processing glass substrate | Emerging Cross-Sectional Technologies | 44 | Expired |
| US6063710A | Method and apparatus for dry etching with temperature control | Electricity | 38 | Expired |
| US5981913A | Static electricity chuck and wafer stage | Emerging Cross-Sectional Technologies | 34 | Expired |
| US5968273A | Wafer stage for manufacturing a semiconductor device | Electricity | 32 | Expired |
| US6135052A | Method and apparatus for temperature control of the semiconductor | Electricity | 22 | Expired |
| US6174408A | Method and apparatus for dry etching | Electricity | 22 | Expired |
| US6391437B1 | COMPOSITE MATERIAL AND MANUFACTURING METHOD THEREOF, SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF, SUBSTRATE MOUNTING STAGE AND MANUFACTURING METHOD THEREOF, AND SUBSTRATE PROCESSING METHOD | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6084763A | Method of holding wafer, method of removing wafer and electrostatic chucking device | Emerging Cross-Sectional Technologies | 13 | Expired |
| USD829792S1 | Electrically operated actuator | General | 8 | Active |
| US6320737A | Electrostatic chucking device | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6668905B1 | Aluminum nitride/aluminum base composite material and method of producing the same | Emerging Cross-Sectional Technologies | 4 | Expired |
| US9931888B2 | Wheel bearing apparatus | Mechanical Engineering; Lighting; Heating | 2 | Active |
| US11204081B2 | Screw shaft, feed screw mechanism, and electric actuator | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US11152840B2 | Electric actuator | Electricity | 1 | Active |
| US6805973B2 | Aluminum nitride/aluminum base composite material and a method for producing thereof | Emerging Cross-Sectional Technologies | 1 | Expired |
| US11149829B2 | Electric actuator | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US12397446B2 | Electrostatic attractor and robot hand comprising same | Performing Operations; Transporting | 0 | Active |
| US11215266B2 | Electric actuator | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11866281B2 | Electrostatic adsorption body | Performing Operations; Transporting | 0 | Active |
| US11428300B2 | Electric actuator | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11162565B2 | Electric actuator | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US12379020B2 | Electric actuator | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11766493B2 | Headgear cleaner and headgear stand | Human Necessities | 0 | Active |
| US11408492B2 | Electric actuator | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11618040B2 | Air cleaner | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.