Patent · US Expired

Semiconductor chip packaging system and a semiconductor chip packaging method using the same

US6392286B1 · kind B1 · utility

5Cited by
14References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 2, 2000
Grant dateMay 21, 2002
Priority date
Expiry dateAug 2, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/181
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The present invention uses an ultraviolet ray to clean PCBs in packaging semiconductors, instead of using a plasma gas. Since the ultraviolet ray cleaning does not require a vacuum condition around an ultraviolet ray lamp, a guide belt for conveying the PCBs can be freely installed in such a manner that an ultraviolet ray cleaning tool and fabricating equipment are arranged in-line. This results in an in-line arrangement of an ultraviolet ray cleaning chamber and the fabricating equipment. Therefore, the PCBs can be introduced into fabricating processes immediately after cleaning and a long standby time problem of the PCB outside of the fabricating equipment is solved.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.