Single-layer dielectric structure with rounded corners, and circuits including such structures

US6396679B1 · kind B1 · utility

Assignee

• TRW Limited · US

Inventors

• Ronald W. Grundbacher · Hermosa Beach, US
• Richard Lai · Redondo Beach, US
• Roger Tsai · Torrance, US
• Michael E. Barsky · West Hollywood, US

Key dates

• Filing date: Oct 18, 2000
• Grant date: May 28, 2002
• Expiry date: Oct 18, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/68

Abstract

A single-layer, metal-insulator-metal capacitor, a monolithic microwave integrated circuit including such capacitors, and a process of fabricating such capacitors. The capacitor has a single layer of insulating material between two metallic layers. At least one of the metallic layers has rounded corners, reducing the electric field at the corners, and so lessening the likelihood of breakdown. In one preferred embodiment, each metal layer has rounded corners. The capacitors can be fabricated by an optical lithographic process.