Materials transport system having inductive power transfer
US6397990B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 28, 1999 |
| Grant date | Jun 4, 2002 |
| Priority date | — |
| Expiry date | Apr 28, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67724
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An inductive power transfer apparatus is provided which is especially useful for a semiconductor wafer handling system or other similar type of materials transport system in which one or more cars are moveable along a track. The system includes a plurality of elongated primary coils each disposed at an intended position along the track. Each of the moveable cars has one or more pick-up or secondary coils which are coupled to the primary coil when the car comes into position along the track. A secondary coil or coils on the car provides power to a battery charging circuit for so long as the secondary is in coupling relationship with the primary or for so long as needed to provide an intended charge to the on board batteries. A drive circuit for the primary coil may be located near the primary coil or alternatively, a single drive circuit can be at a central location to provide drive signals to a plurality of primary coils. The drive circuit can be activated by sensing the presence of a secondary coil in coupling position with the primary coil. The charge current can be controlled to suit the characteristics or charge status of the batteries.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.