Patent · US Expired

Apparatus for purging the beam path of a UV laser beam

US6399916B1 · kind B1 · utility

10Cited by

6References

7Claims

0Family size

Assignee

Lambda Physik AG · DE

Inventors

Andreas Görtler · Bamberg, DE
Andreas Haupt · Göttingen, DE

Key dates

Filing date	Aug 10, 1998
Grant date	Jun 4, 2002
Priority date	—
Expiry date	Aug 10, 2018

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/225
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A device for flushing the optical path of a UV laser beam has a casing (18) with which the optical path is separated from the external atmosphere (26). In order to maximize the life of the optical components (24, 26) in the optical path, a noble gas, in particular argon, is used for flushing the optical path.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.