Method and apparatus for inspecting appearance of objects by irradiating illumination light on the objects
US6399957B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 23, 1999 |
| Grant date | Jun 4, 2002 |
| Priority date | — |
| Expiry date | Nov 23, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/9513
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An appearance inspection method of the invention comprises: a first step for inspecting an object to be inspected by illuminating the object to be inspected mounted on a first stage and receiving scattered light therefrom, a second step for inspecting the object to be inspected by illuminating the object to be inspected mounted on a second stage and receiving diffracted light therefrom, and a transfer step for transferring the object to be inspected between the first stage and the second stage so that either one of the first step and the second step is carried out after the other. As a result, with this appearance inspection method, it is possible to prevent a lengthening in the throughput time even when a plurality of inspections are automatically carried out, while maintaining the same functions as for conventional inspection which is carried out visually.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.