Capacitive displacement sensor for measuring thin targets
US6400162B1 · kind B1 · utility
35Cited by
4References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2000 |
| Grant date | Jun 4, 2002 |
| Priority date | — |
| Expiry date | Jul 21, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive displacement sensor for measuring thin targets is presented. The plate of the measurement probe is designed to take into account the thin target shape and to provide accurate measurements of the thin target by reducing lateral movement sensitivity of the plate. The probe may also include a guard to reduce capacitive coupling of the plate with other structures which would affect the accuracy of the measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.