Inventor · Bedford, MA, US

Roy E. Mallory

14Patents
7h-index
10Co-inventors
63Inventor score

Filing activity: Mar 22, 1982 → May 25, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US5642298A Wafer testing and self-calibration system Emerging Cross-Sectional Technologies 121 Expired
US4457664A Wafer alignment station Emerging Cross-Sectional Technologies 93 Expired
US6400162B1 Capacitive displacement sensor for measuring thin targets Physics 35 Expired
US4958129A Prealigner probe Physics 34 Expired
US4646009A Contacts for conductivity-type sensors Physics 14 Expired
US5708368A Method and apparatus for emulation of a linear variable differential transducer by a capacitive gaging system Physics 13 Expired
US6560555B1 Method for facilitating the field replacement of sensors Physics 12 Expired
US7114399B2 Shaped non-contact capacitive displacement sensors for measuring shaped targets Physics 7 Expired
US7629798B2 Wafer edge-defect detection and capacitive probe therefor Electricity 5 Active
US5786698A Transducer Bootstrapping apparatus Electricity 5 Expired
US6181142A Nonlinear current mirror for loop-gain control Physics 3 Expired
US6714023B2 Method for high-accuracy non-contact capacitive displacement measurement of poorly connected targets Physics 2 Expired
US6556941B2 Separation of periodic and non-periodic signal components Physics 2 Expired
US6476621B1 Self-bootstrapping transducer interface Emerging Cross-Sectional Technologies 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.