Ultra accurate gas injection system
US6405745B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 22, 2000 |
| Grant date | Jun 18, 2002 |
| Priority date | — |
| Expiry date | Mar 22, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86389
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ultra accurate gas injection system includes an input device for inputting setpoint data including a target flow rate for the flow of gas into the system. The gas flows through a mass flow controller at an actual flow rate. The mass flow controller issues a flow rate signal indicative of at least the actual flow rate and receives a flow control signal. The mass flow controller is configured to control the actual flow rate dependent at least in part upon the flow control signal. A programmable controller is electrically connected to the input device and the mass flow controller. The programmable controller receives the setpoint data from the input device and issues the flow control signal, the flow control signal being dependent at least in part upon the target flow rate contained within the setpoint data. The programmable controller repeatedly reads the flow rate signal and compares the actual flow rate with the target flow rate. The programmable controller adjusts the flow rate signal dependent at least in part upon the comparison of the actual flow rate with the target flow rate, and is configured to adjust the flow control signal such that the actual flow rate is substantiall…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.