Patent · US Expired

Interferometer and method for measuring the refractive index and optical path length effects of air

US6407816B1 · kind B1 · utility

18Cited by
7References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 13, 2000
Grant dateJun 18, 2002
Priority date
Expiry dateDec 13, 2020

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B2290/70
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Apparatus and methods particularly suitable for use in electro-optical metrology and other applications to measure and monitor the refractive index of a gas in a measurement path and/or the change in optical path length of the measurement path due to the gas while the refractive index of the gas may be fluctuating due to turbulence or the like and/or the physical length of the measuring path may be changing. More specifically, the invention employs electronic frequency processing to provide measurements of dispersion of the refractive index, the dispersion being substantially proportional to the density of the gas, and/or measurements of dispersion of the optical path length, the dispersion of the optical path length being related to the dispersion of the refractive index and the physical length of the measurement path. The refractive index of the gas and/or the optical path length effects of the gas are subsequently computed from the measured dispersion of the refractive index and/or the measured dispersion of the optical path length, respectively. The information generated by the inventive apparatus is particularly suitable for use in interferometric distance measuring instrument…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.