Coupled cavity anti-guided vertical-cavity surface-emitting laser
US6411638B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 1999 |
| Grant date | Jun 25, 2002 |
| Priority date | — |
| Expiry date | Aug 31, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/166
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser structure (10, 60) and method of manufacturing a vertical-cavity surface-emitting laser (VCSEL). The laser structure (10, 60) is adapted to lase at a wavelength lambda and includes a first mirror stack (14), an active region (18) disposed on the first mirror stack (14) and a second mirror stack (22) disposed on the active region (18). The second mirror stack (22) includes a plurality of alternating mirror layer pairs (a, b) with a phase shifting region (24) disposed therein. The phase shifting region (24) is positioned outside the optical aperture (25) and away from the active region (18) by at least one mirror layer pair, with the optical thickness of the phase shifting region (24) being a multiple of one-fourth lambda, the phase shifting region (24) being oxidized reducing the reflectance of the second mirror stack (22) outside the aperture relative to inside the aperture. The optical thickness of the phase shifting region (24) is a function of the difference between the index of refraction of an adjacent semiconductor layer and the index of refraction of the phase shifting region. The phase shifting region (24) creates a coupled cavity (25, 68) positioned above the activ…
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