Methods and apparatus for improving resolution and reducing noise in an image detector for an electron microscope
US6414309B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 26, 2001 |
| Grant date | Jul 2, 2002 |
| Priority date | — |
| Expiry date | Feb 26, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2445
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods and apparatus are provided which improve the performance of electron imaging detectors by reducing the total interaction volume of the detector and/or reducing the energy converting volume of the detector. In one embodiment, a method for improving resolution and reducing noise in an imaging electron detector for an electron microscope is provided and includes the step of decelerating the energetic electrons either before the electrons interact with, or as the electrons interact with, the energy converting volume of an imaging electron detector. In other embodiments, the lateral spatial travel of energetic electrons is limited as they traverse the imaging electron detector, or, the extent of electron back scatter from the energetic electrons is limited.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.