Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it
US6414438B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 20, 2000 |
| Grant date | Jul 2, 2002 |
| Priority date | — |
| Expiry date | Oct 20, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/001
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A method and apparatus produce short-wave radiation from a gas-discharge plasma, comprising pre-ionization of the gas in the discharge region between coaxial electrodes achieved through an axial aperture formed in one of the electrodes and initiation of a pinch-type discharge. In order to increase the efficiency, energy, average power and stability of the radiation of the gas-discharge plasma, pre-ionization is achieved by a flux of radiation having wavelengths from the UV to X-ray range and by a flux of accelerated electrons from the plasma of a pulsed sliding discharge initiated in a region not optically communicating with the axis of the pinch-type discharge, with a rate of growth of the discharge voltage across the region of more than 1011 V/s, the fluxes of radiation and electrons being formed axially symmetrically and directed into the part of the discharge region outside the axis. In a device for implementing the method, the source of pre-ionization is disposed outside the discharge chamber and is designed in the form of an axially symmetrical system for forming a sliding discharge, said system comprising an elongated initiating electrode coated with a dielectric layer on th…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.