Transfer mechanism for use in exchange of probe card
US6414478B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 7, 2000 |
| Grant date | Jul 2, 2002 |
| Priority date | — |
| Expiry date | Jul 13, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card transfer mechanism, in which a chuck top is used as a main transfer mechanism, comprises a passing and receiving mechanism for passing or receiving a probe card to or from the chuck top. The passing and receiving mechanism has an adapter for detachably holding the probe card having, for example, a card holder, a transfer tray for detachably holding the adapter, a pair of guide rails for guiding the transfer tray to a probe card passing and receiving position, an arm to which the guide rails are fixed, and a probe card supporting member for receiving the adapter conveyed together with the transfer tray along the arm. The probe card supporting member is provided around the chuck top. A distal end portion of the transfer tray is U-shaped. The transfer tray is mounted on the U-shaped portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.