Gas discharge laser with blade-dielectric electrode
US6414979B2 · kind B2 · utility
95Cited by
18References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2001 |
| Grant date | Jul 2, 2002 |
| Priority date | — |
| Expiry date | Jan 23, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/2207
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A gas discharge laser having a laser chamber with two elongated erodable electrode elements, at least one of said electrode element having a generally blunt blade-shaped portion comprised of a material having high electrical conductivity with a flow shaping dielectric fairing positioned on each of two sides of said blunt blade-shaped portion. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 10 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.