Controller for RF power generator with reduced cable length sensitivity
US6417732B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 6, 2001 |
| Grant date | Jul 9, 2002 |
| Priority date | — |
| Expiry date | Apr 6, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03F3/189
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A radio frequency (RF) power generator system includes a power generator that generates a RF power signal that is output to a load. The RF generator generates a forward power feedback signal and a reverse power feedback signal. A controller receives the forward power feedback signal and the reverse power feedback signal. The controller generates a setpoint signal that is output to the power generator. A setpoint modifier receives the forward feedback signal, the reverse feedback signal and an external setpoint signal. The setpoint modifier calculates a forward power limit based on the forward and reverse power feedback signals. The setpoint modifier and outputs a modified setpoint signal to the controller based on one of the forward power limit and the external setpoint signal. The setpoint modifier and the controller can be integrated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.