Patent assignee · US · COMPANY

ENI Technology, Inc.

34Patents
0Active
34Granted
39Portfolio score

Filing activity: Feb 27, 1998 → Sep 8, 2003

Most-cited patents

PatentTitleAreaCited byStatus
US6469919B1 Power supplies having protection circuits Electricity 222 Expired
US6703080B2 Method and apparatus for VHF plasma processing with load mismatch reliability and stability Electricity 203 Expired
US6677828B1 Method of hot switching a plasma tuner Electricity 106 Expired
US6522121B2 Broadband design of a probe analysis system Electricity 59 Expired
USRE39051E1 Fuzzy logic tuning of RF matching network General 50 Expired
US6449568B1 Voltage-current sensor with high matching directivity Electricity 50 Expired
US6750711B2 RF power amplifier stability Electricity 38 Expired
US6707255B2 Multirate processing for metrology of plasma RF source Electricity 38 Expired
US6708123B2 Voltage current sensor with high matching directivity Electricity 34 Expired
US6765469B2 Printed circuit board transformer Electricity 30 Expired
US6778921B2 Modular architecture for industrial power delivery system Electricity 25 Expired
US6618276B2 Power supplies having protection circuits Electricity 25 Expired
US6417732B1 Controller for RF power generator with reduced cable length sensitivity Electricity 23 Expired
US6524455B1 Sputtering apparatus using passive arc control system and method Electricity 23 Expired
US6555994B1 Predictive control of a generator output Physics 18 Expired
US6885567B2 Class E amplifier with inductive clamp Electricity 16 Expired
US6700092B2 Pulsing intelligent RF modulation controller Electricity 14 Expired
US6718272B1 Fast transient protection for RF plasma generator Electricity 12 Expired
US6608446B1 Method and apparatus for radio frequency (RF) metrology Physics 10 Expired
USRE38273E1 Baseband RF voltage-current probe General 9 Expired
US6459067B1 Pulsing intelligent RF modulation controller Electricity 9 Expired
US6627464B2 Adaptive plasma characterization system Physics 8 Expired
US6868310B2 Predictive failure scheme for industrial thin films processing power delivery system Emerging Cross-Sectional Technologies 8 Expired
US6657394B2 Reflection coefficient phase detector Physics 7 Expired
US6587019B2 Dual directional harmonics dissipation system Electricity 6 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.