Porous materials
US6420441B1 · kind B1 · utility
139Cited by
16References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 10, 1999 |
| Grant date | Jul 16, 2002 |
| Priority date | — |
| Expiry date | Dec 10, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/96
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Porous dielectric materials having low dielectric constants useful in electronic component manufacture are disclosed along with methods of preparing the porous dielectric materials. Also disclosed are methods of forming integrated circuits containing such porous dielectric materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.