Inventor · Hopkinton, MA, US

Michael K. Gallagher

59Patents
15h-index
55Co-inventors
87Inventor score

Filing activity: Jan 31, 1989 → Apr 1, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6420441B1 Porous materials Emerging Cross-Sectional Technologies 139 Expired
US6271273A Porous materials Electricity 123 Expired
US6391932B1 Porous materials Electricity 81 Expired
US6596467B2 Electronic device manufacture Emerging Cross-Sectional Technologies 69 Expired
US5540981A Inorganic-containing composites Performing Operations; Transporting 64 Expired
US7018678B2 Electronic device manufacture Emerging Cross-Sectional Technologies 38 Expired
US6599951B2 Antireflective porogens Emerging Cross-Sectional Technologies 35 Expired
US7256127B2 Air gap formation Emerging Cross-Sectional Technologies 35 Expired
US6667147B2 Electronic device manufacture Emerging Cross-Sectional Technologies 30 Expired
US6576681B2 Antireflective porogens Emerging Cross-Sectional Technologies 22 Expired
US6602804B2 Porous materials Emerging Cross-Sectional Technologies 21 Expired
US5005101A Method and apparatus for negative charge effect and separation of undesirable gases Emerging Cross-Sectional Technologies 19 Expired
US6596405B2 Antireflective porogens Emerging Cross-Sectional Technologies 16 Expired
US6903175B2 Polymer synthesis and films therefrom Electricity 15 Expired
US5434199A Epoxy molding composition for surface mount applications Emerging Cross-Sectional Technologies 15 Expired
US7723850B2 Electronic devices having air gaps Emerging Cross-Sectional Technologies 12 Active
US7776506B2 Coating compositions for photoresists Physics 9 Active
US6852367B2 Stable composition Chemistry; Metallurgy 6 Expired
US7605439B2 Antireflective hard mask compositions Physics 6 Active
US6998148B1 Porous materials Electricity 5 Expired
US7781141B2 Compositions and processes for immersion lithography Physics 4 Expired
US7294453B2 Electronic device manufacture Emerging Cross-Sectional Technologies 4 Expired
US8889344B2 Coating compositions Physics 3 Expired
US8012666B2 Compositions and processes for photolithography Physics 3 Active
US9269623B2 Ephemeral bonding Electricity 3 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.