Modular substrate measurement system

US6420864B1 · kind B1 · utility

Assignees

• Nanophotonics Co., Ltd. · DE
• Recif SA · FR

Inventors

• Michael Abraham · Mainz, DE
• Ivo Raaijmakers · Bilthoven, NL
• Alain Gaudon · Colomiers, FR
• Pierre Astegno · Castelginest, FR

Key dates

• Filing date: Apr 13, 2000
• Grant date: Jul 16, 2002
• Expiry date: Apr 13, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67196
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Substrate measurement system including a measurement chamber (30), and a substrate handling chamber (7) possessing substrate transfer means (10) and a substrate container interface (1) arranged to receive a substrate container (8), the handling chamber (7) containing an interface (50) to connect the measurement chamber (30), the measurement chamber (30) containing an interface (51) to connect to the handling chamber (7), and the transfer means (10) being arranged to transfer substrates between the container (8) and the measurement chamber (30) through the handling chamber (7), in which a second measurement chamber (39) is provided, having the same interface (51) as the first measurement chamber (30) to replace the latter chamber (30).