Mini-environment control system and method
US6422823B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2000 |
| Grant date | Jul 23, 2002 |
| Priority date | — |
| Expiry date | Dec 6, 2020 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B19/006
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A mini-environment control device includes an individual enclosure to contain a sample and to isolate it from the external environment. An array of micropumps attached to the individual enclosure generates and maintains a controlled vacuum in the individual enclosure. Transfer means introduce the sample into the individual enclosure and extract it therefrom. The micropumps of the array of micropumps can be of a type employing the thermal transpiration effect. Temperature and pressure microsensors and a gas analyzer enable the operation of the array of micropumps to be controlled by an onboard microcomputer. The atmosphere surrounding a sample is therefore controlled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.