Catadioptric objective with physical beam splitter

US6424471B1 · kind B1 · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Willi Ulrich · Aalen, DE
• Helmut Beierl · Heidenheim, DE

Key dates

• Filing date: Nov 10, 2000
• Grant date: Jul 23, 2002
• Expiry date: Dec 26, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70225
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A catadioptric projection objective comprises an object plane, a physical beam splitter, a concave mirror, an image plane, a first objective part, a second objective part, and a third objective part. The first objective part is located between the object plane and the physical beam splitter. The second objective part is located between the physical beam splitter and the concave mirror, and includes at least two divergent lenses. The third objective part is located between the physical beam splitter and the image plane.