Pressure insensitive gas control system
US6425281B1 · kind B1 · utility
27Cited by
22References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2000 |
| Grant date | Jul 30, 2002 |
| Priority date | — |
| Expiry date | Jul 12, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/2632
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure insensitive gas process device that includes a gas sensor and restrictions upstream and downstream of the gas sensor. The restrictions result in pressure drops upstream and downstream of the gas sensor which shield the gas sensor from upstream and downstream pressure changes, respectively, rendering the gas sensor and the entire gas process device insensitive to pressure changes. Gas process devices in which pressure insensitivity may be achieved include mass flow controllers as well as other types of devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.