Cooling system for reducing particles pollution
US6427470B1 · kind B1 · utility
1Cited by
4References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 5, 2001 |
| Grant date | Aug 6, 2002 |
| Priority date | — |
| Expiry date | Feb 5, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC21D1/613
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a cooling system of a furnace, more particularly, to a multi-cycle cooling system, located by the furnace door. The probability of pollution by particles can be decreased and the lifetime of the furnace devices can be extended by using different liquid and gas cycles, cooling the different steps the semiconductor processes in the furnace.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.